Semiconductor Manufacturing Through a Metrology Lens

Define critical dimension, pitch, overlay, edge-placement error, film thickness, and defectivity.

Distinguish metrology, inspection, defect review, failure analysis, and process control.

Classify semiconductor measurements as inline, at-line, offline, destructive, or nondestructive.

Explain how a measurement signal can lead to process correction and yield improvement.

Identify why shrinking features and increasingly three-dimensional devices make metrology more difficult.